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Series Glass & Fused Silica Wafers

Our designers and engineers are skilled at working with any number of glass and quartz materials to machine and fabricate precision optical products such as fused quartz parts for optics, fused silica parts used in fiber optic applications, and borosilicate glass parts found in semi-conductor manufacturing.

The general specs are as follows sheet, if your specified is not included with it, you may freely tell us and we’ll pleased to customize them for you.

spec	unit	4″	6″	8″	10″	12”
Diameter/size(or square)	mm	100	150	200	250	300
Tolerance (±)	mm	0.2	0.2	0.2	0.2	0.2
Thickness	mm	0.10 or more	0.30 or more	0.40 or more	0.50 or more	0.50 or more
Primary reference flat	mm	32.5	57.5	Semi-notch	Semi-notch	Semi-notch
LTV (5mmx5mm)	µm	< 0.5	< 0.5	< 0.5	< 0.5	< 0.5
TTV	µm	< 2	< 3	<3	<5	<5
Bow	µm	±20	±30	±40	±40	±40
Warp	µm	≤ 30	≤ 40	≤ 50	≤ 50	≤ 50
PLTV(5mm*5mm)<0.4um	%	≥95%	≥95%	≥95%	≥95%	≥95%
Edge Rounding	mm	Compliant with SEMI M1.2 Standard/refer to IEC62276
Surface Type		Single Side Polished /Double Sides Polished
Polished side Ra	nm	≤1
Back Side Criteria	µm	general 0.2-0.7 or customized

Material included: : Borofloat33/B270/D263/BK7 etc.

Series Glass : Eagle XG , Fused Silica 7980/7978/7979 etc.

Series Glass : Fused Silica JGS1/JGS2 & Single quartz etc.

Series Glass : H-K9L glass/ Soda Lime etc.

Process capability:

Item	Capability
Diameter	5mm – 400mm
Thickness	50μm or more
Dimensional Tolerance	+/- 25μm
Thickness Tolerance	+/- 5μm
Thickness Variation(TTV)	< 2μm
Flatness	1/10 Wave/Inch
Surface Roughness (RMS)	<5Ǻ
Scratch and Dig	10/5
Particle Size	<10μm
Bow/Warp	<10μm

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